Fabrication and modeling of a novel SAW-like transducer device based on branched carbon nanotubes

S. Darbari, Y. Abdi, A. Ebrahimi, Narges Doostani, S. Mohajerzadeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel interdigital sensor and actuator device based on branched carbon nanotubes (B-CNTs) on silicon-based membranes with a high capacitance value is reported. The presence of B-CNTs leads to a high overlap between interdigital (ID) fingers and the resulted capacitance value. The formation of a sensor/actuator system is based on ID patterns on silicon-based membranes, and the branched carbon nanostructures have been grown selectively on the electrodes. The actuation behavior of the device has been investigated in a SAW-like sensor and actuator device which has been placed on a flexible membrane.

Original languageEnglish (US)
Title of host publicationSensors, Actuators, and Microsystems (General) - 219th ECS Meeting
Pages131-135
Number of pages5
Edition30
DOIs
StatePublished - 2011
EventSensors, Actuators, and Microsystems General Session - 219th ECS Meeting - Montreal, QC, Canada
Duration: May 1 2011May 6 2011

Publication series

NameECS Transactions
Number30
Volume35
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSensors, Actuators, and Microsystems General Session - 219th ECS Meeting
CountryCanada
CityMontreal, QC
Period5/1/115/6/11

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Darbari, S., Abdi, Y., Ebrahimi, A., Doostani, N., & Mohajerzadeh, S. (2011). Fabrication and modeling of a novel SAW-like transducer device based on branched carbon nanotubes. In Sensors, Actuators, and Microsystems (General) - 219th ECS Meeting (30 ed., pp. 131-135). (ECS Transactions; Vol. 35, No. 30). https://doi.org/10.1149/1.3653931