Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors

Ashtosh Ganjoo, H. Jain, J. V. Ryan, R. Song, R. Chanda, J. Irudayaraf, Y. J. Ding, C. G. Pantano

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.

Original languageEnglish (US)
Article number105
Pages (from-to)637-642
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5593
DOIs
StatePublished - Dec 1 2004
EventNanosensing Materials and Devices - Philadelphia, PA, United States
Duration: Oct 25 2004Oct 28 2004

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Ganjoo, A., Jain, H., Ryan, J. V., Song, R., Chanda, R., Irudayaraf, J., Ding, Y. J., & Pantano, C. G. (2004). Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors. Proceedings of SPIE - The International Society for Optical Engineering, 5593, 637-642. [105]. https://doi.org/10.1117/12.573900