10 Citations (Scopus)

Abstract

The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. Furthermore, the lost mold-rapid infiltration forming process (LM-RIF) is described, and compared to existing fabrication approaches. Finally, prototype mesoscale compliant mechanisms are fabricated, demonstrating the versatility of the LM-RIF process to produce both metal and ceramic devices, as well as ability of a fabrication process to work in collaboration with mechanical design.

Original languageEnglish (US)
Pages (from-to)129-137
Number of pages9
JournalMechanical Sciences
Volume2
Issue number1
DOIs
StatePublished - Jan 1 2011

Fingerprint

Compliant mechanisms
Fabrication
Infiltration
Mechanical engineering
Materials science
Metals

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

Cite this

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abstract = "The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. Furthermore, the lost mold-rapid infiltration forming process (LM-RIF) is described, and compared to existing fabrication approaches. Finally, prototype mesoscale compliant mechanisms are fabricated, demonstrating the versatility of the LM-RIF process to produce both metal and ceramic devices, as well as ability of a fabrication process to work in collaboration with mechanical design.",
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Fabrication of compliant mechanisms on the mesoscale. / Hayes, G. R.; Frecker, M. I.; Adair, J. H.

In: Mechanical Sciences, Vol. 2, No. 1, 01.01.2011, p. 129-137.

Research output: Contribution to journalArticle

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