Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry

Wei Hung Su, Karl Martin Reichard, Shizhuo Yin, Francis T S Yu

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to calibration-based highly accurate phase-shifting projected fringe profilometry are presented. The main advantages of using digital sinusoidal gratings are (1) high geometrical accuracy (< 1 μm); (2) high contrast ratio; and (3) very low high-order harmonic distortion. In addition, a high-quality diffusive flat with precisely controlled lateral correlation length, fabricated by VLSI processes, offers a good calibration standard. It is found that, by applying these two components to the calibration-based phase-shifting projected fringe profilometry, absolute 3-D surface profile measurement accuracy on the order of microns can be achieved.

Original languageEnglish (US)
Pages (from-to)1730-1740
Number of pages11
JournalOptical Engineering
Volume42
Issue number6
DOIs
StatePublished - Jun 1 2003

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Profilometry
gratings
Calibration
Fabrication
fabrication
very large scale integration
Surface measurement
Harmonic distortion
harmonics
profiles

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

Cite this

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