FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH.

K. D. Wise, Thomas Nelson Jackson, N. A. Masnari, M. G. Robinson, D. E. Solomon, G. H. Wuttke, W. B. Rensel

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.

Original languageEnglish (US)
Pages (from-to)936-939
Number of pages4
JournalJournal of vacuum science & technology
Volume16
Issue number3
DOIs
StatePublished - Jan 1 1979

Fingerprint

Laser fusion
Electron beams
Etching
Fusion reactions
Semiconductor materials
Membranes
Fabrication
Glass
Silicon
Networks (circuits)
Processing
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Wise, K. D. ; Jackson, Thomas Nelson ; Masnari, N. A. ; Robinson, M. G. ; Solomon, D. E. ; Wuttke, G. H. ; Rensel, W. B. / FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH. In: Journal of vacuum science & technology. 1979 ; Vol. 16, No. 3. pp. 936-939.
@article{7e67aa1acba34c66b5eff989dde6eaa3,
title = "FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH.",
abstract = "The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.",
author = "Wise, {K. D.} and Jackson, {Thomas Nelson} and Masnari, {N. A.} and Robinson, {M. G.} and Solomon, {D. E.} and Wuttke, {G. H.} and Rensel, {W. B.}",
year = "1979",
month = "1",
day = "1",
doi = "10.1116/1.570116",
language = "English (US)",
volume = "16",
pages = "936--939",
journal = "Journal of Vacuum Science and Technology",
issn = "0022-5355",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH. / Wise, K. D.; Jackson, Thomas Nelson; Masnari, N. A.; Robinson, M. G.; Solomon, D. E.; Wuttke, G. H.; Rensel, W. B.

In: Journal of vacuum science & technology, Vol. 16, No. 3, 01.01.1979, p. 936-939.

Research output: Contribution to journalArticle

TY - JOUR

T1 - FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH.

AU - Wise, K. D.

AU - Jackson, Thomas Nelson

AU - Masnari, N. A.

AU - Robinson, M. G.

AU - Solomon, D. E.

AU - Wuttke, G. H.

AU - Rensel, W. B.

PY - 1979/1/1

Y1 - 1979/1/1

N2 - The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.

AB - The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.

UR - http://www.scopus.com/inward/record.url?scp=0018469179&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0018469179&partnerID=8YFLogxK

U2 - 10.1116/1.570116

DO - 10.1116/1.570116

M3 - Article

VL - 16

SP - 936

EP - 939

JO - Journal of Vacuum Science and Technology

JF - Journal of Vacuum Science and Technology

SN - 0022-5355

IS - 3

ER -