FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION RESEARCH.

K. D. Wise, T. N. Jackson, N. A. Masnari, M. G. Robinson, D. E. Solomon, G. H. Wuttke, W. B. Rensel

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Abstract

The application of silicon-based techniques for producing laser fusion pellets is considered. Initial investigations and laboratory experiments using solid state circuit processing techniques to create special target components have indicated the feasibility of a unique advanced manufacturing concept. Efforts to demonstrate electron beam patterning and etching of micron-high letters through the walls of glass microballoons, the fabrication of free-standing thin-walled flanged hemispheres joined to form spherical structures, and a pellet support membrane are described.

Original languageEnglish (US)
Pages (from-to)936-939
Number of pages4
JournalJournal of vacuum science & technology
Volume16
Issue number3
DOIs
StatePublished - Jan 1 1979

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

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