Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr 0.52Ti 0.48)O 3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750°C for 1-3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO 3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Materials Chemistry