Fabrication of high aspect ratio ferroelectric microtubes by vacuum infiltration using macroporous silicon templates

S. S.N. Bharadwaja, M. Olszta, S. Trolier-McKinstry, X. Li, T. S. Mayer, F. Roozeboom

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr 0.52Ti 0.48)O 3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750°C for 1-3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO 3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.

Original languageEnglish (US)
Pages (from-to)2695-2701
Number of pages7
JournalJournal of the American Ceramic Society
Volume89
Issue number9
DOIs
StatePublished - Sep 1 2006

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Silicon
Infiltration
Ferroelectric materials
Aspect ratio
Vacuum
Fabrication
Rapid thermal annealing
Crystallization
Perovskite
Chemical reactions
Transmission electron microscopy
X ray diffraction
Temperature

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

Cite this

Bharadwaja, S. S.N. ; Olszta, M. ; Trolier-McKinstry, S. ; Li, X. ; Mayer, T. S. ; Roozeboom, F. / Fabrication of high aspect ratio ferroelectric microtubes by vacuum infiltration using macroporous silicon templates. In: Journal of the American Ceramic Society. 2006 ; Vol. 89, No. 9. pp. 2695-2701.
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Fabrication of high aspect ratio ferroelectric microtubes by vacuum infiltration using macroporous silicon templates. / Bharadwaja, S. S.N.; Olszta, M.; Trolier-McKinstry, S.; Li, X.; Mayer, T. S.; Roozeboom, F.

In: Journal of the American Ceramic Society, Vol. 89, No. 9, 01.09.2006, p. 2695-2701.

Research output: Contribution to journalArticle

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AU - Trolier-McKinstry, S.

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AU - Mayer, T. S.

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