A simple method for fabricating periodic arrays of high aspect ratio (1:20) standing nanorods on silicon substrates is described. It is based on shadow deposition onto periodically arranged arrays of mini-rods on a rotating sample stage. Consequently, such nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for industrial applications.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Computer Science Applications
- Electrical and Electronic Engineering