Fabrication of periodic standing rod arrays by the shadow cone method

Hirofumi Tanaka, Paul S. Weiss, Mark W. Horn

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

A simple method for fabricating periodic arrays of high aspect ratio (1:20) standing nanorods on silicon substrates is described. It is based on shadow deposition onto periodically arranged arrays of mini-rods on a rotating sample stage. Consequently, such nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for industrial applications.

Original languageEnglish (US)
Article number00520
Pages (from-to)815-819
Number of pages5
JournalInternational Journal of Nanoscience
Volume5
Issue number6
DOIs
StatePublished - Dec 1 2006

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Bioengineering
  • Materials Science(all)
  • Condensed Matter Physics
  • Computer Science Applications
  • Electrical and Electronic Engineering

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