Fabrication of piezoelectric diaphragm using lead zirconate titanate (PZT) films

E. Hong, S. V. Krishnaswamy, C. B. Freidhoff, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Piezoelectric diaphragms were fabricated using bulk micromachining. The diaphragms had a unimorph structure, where Pb(Zr0.52Ti0.48)O3 (PZT) and thermally grown silicon oxide (SiO2) films were used as the active and passive layers, respectively. To actuate the diaphragms, two modes were designed: d31 and d33-mode. For d31-mode diaphragms, a Si wafer with Pt/Ti/SiO2 (0.5 μm) was coated with ∼1.2 μm PZT. A Cr/Au top electrode was then evaporated. Each layer including the bottom electrode was patterned into a circular shape. To fabricate d33-mode diaphragms, a Si wafer with thermal SiO2 (0.5 μm) was coated with ∼0.3 μm ZrO2 and ∼1.6 μm of PZT. On top of these layers, a Cr/Au top electrode was deposited and patterned into a ring-shaped interdigitated transducer. Finally, both d31 and d33-mode diaphragms were released using deep reactive ion etching. Diameters of the fabricated diaphragms were in the range of 600 μm and 1000 μm. For d31-mode diaphragms, the dielectric constant and loss of the released piezoelectric layer at 1 kHz were > 800 and < 2%, respectively. The remanent polarization was ∼20 μC/cm2 and the coercive field was ∼61 kV/cm. Ferroelectric measurements showed well-developed hysteresis loops for the d33-mode diaphragms. Both d31 and d33-mode diaphragms behave as membranes rather than plates. Their measured resonance frequencies were consistent with calculations from an analytic model for circular membranes and ANSYS finite element analysis.

Original languageEnglish (US)
Pages (from-to)131-136
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume687
StatePublished - Jan 1 2002

Fingerprint

diaphragms
Diaphragms
Fabrication
fabrication
Electrodes
electrodes
lead titanate zirconate
wafers
membranes
Membranes
Remanence
Silicon oxides
Reactive ion etching
Micromachining
Dielectric losses
micromachining
Hysteresis loops
silicon oxides
dielectric loss
Oxide films

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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title = "Fabrication of piezoelectric diaphragm using lead zirconate titanate (PZT) films",
abstract = "Piezoelectric diaphragms were fabricated using bulk micromachining. The diaphragms had a unimorph structure, where Pb(Zr0.52Ti0.48)O3 (PZT) and thermally grown silicon oxide (SiO2) films were used as the active and passive layers, respectively. To actuate the diaphragms, two modes were designed: d31 and d33-mode. For d31-mode diaphragms, a Si wafer with Pt/Ti/SiO2 (0.5 μm) was coated with ∼1.2 μm PZT. A Cr/Au top electrode was then evaporated. Each layer including the bottom electrode was patterned into a circular shape. To fabricate d33-mode diaphragms, a Si wafer with thermal SiO2 (0.5 μm) was coated with ∼0.3 μm ZrO2 and ∼1.6 μm of PZT. On top of these layers, a Cr/Au top electrode was deposited and patterned into a ring-shaped interdigitated transducer. Finally, both d31 and d33-mode diaphragms were released using deep reactive ion etching. Diameters of the fabricated diaphragms were in the range of 600 μm and 1000 μm. For d31-mode diaphragms, the dielectric constant and loss of the released piezoelectric layer at 1 kHz were > 800 and < 2{\%}, respectively. The remanent polarization was ∼20 μC/cm2 and the coercive field was ∼61 kV/cm. Ferroelectric measurements showed well-developed hysteresis loops for the d33-mode diaphragms. Both d31 and d33-mode diaphragms behave as membranes rather than plates. Their measured resonance frequencies were consistent with calculations from an analytic model for circular membranes and ANSYS finite element analysis.",
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Fabrication of piezoelectric diaphragm using lead zirconate titanate (PZT) films. / Hong, E.; Krishnaswamy, S. V.; Freidhoff, C. B.; Trolier-McKinstry, Susan E.

In: Materials Research Society Symposium - Proceedings, Vol. 687, 01.01.2002, p. 131-136.

Research output: Contribution to journalArticle

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T1 - Fabrication of piezoelectric diaphragm using lead zirconate titanate (PZT) films

AU - Hong, E.

AU - Krishnaswamy, S. V.

AU - Freidhoff, C. B.

AU - Trolier-McKinstry, Susan E.

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