Fabrication of silicon-based actuators using branched carbon nano-structures

Sara Darbari, Yaser Abdi, Aida Ebrahimi, Shamsoddin Mohajerzadeh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We report a novel interdigital sensor and actuator device based on branched tree-like carbon nanotubes (CNT) on silicon-based membranes with a high capacitance value. The presence of tree-like CNTs leads to a high overlap between interdigital fingers owing to their three dimensional nanometric features, hence increasing the value of the capacitance from 0.2 to 15 pF. The electromechanical behavior of the device has been investigated with monitoring capacitive characteristics of the sensor. An almost linear rise in the capacitance value by applying the external voltage is observed which could be due to the modulated overlapping between neighboring electrodes. The response of the sensor/actuator device to various frequencies has been studied.

Original languageEnglish (US)
Article number5657224
Pages (from-to)1535-1540
Number of pages6
JournalIEEE Sensors Journal
Volume11
Issue number7
DOIs
StatePublished - May 30 2011

Fingerprint

Capacitance
Actuators
actuators
capacitance
Fabrication
Silicon
fabrication
Carbon
carbon
sensors
Sensors
silicon
carbon nanotubes
Carbon nanotubes
membranes
Membranes
Electrodes
electrodes
Monitoring
Electric potential

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Darbari, Sara ; Abdi, Yaser ; Ebrahimi, Aida ; Mohajerzadeh, Shamsoddin. / Fabrication of silicon-based actuators using branched carbon nano-structures. In: IEEE Sensors Journal. 2011 ; Vol. 11, No. 7. pp. 1535-1540.
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Fabrication of silicon-based actuators using branched carbon nano-structures. / Darbari, Sara; Abdi, Yaser; Ebrahimi, Aida; Mohajerzadeh, Shamsoddin.

In: IEEE Sensors Journal, Vol. 11, No. 7, 5657224, 30.05.2011, p. 1535-1540.

Research output: Contribution to journalArticle

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