Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

Ivan Divliansky, Theresa S. Mayer, Kito S. Holliday, Vincent H. Crespi

Research output: Contribution to journalArticle

165 Scopus citations

Abstract

The recording of three-dimensional periodic structures in a photosensitive polymer using a single diffraction element mask was reported. The central opening of the mask was surrounded by three diffraction gratings oriented 120° relative to one another such that the nondiffracted laser beam and the three first order diffracted beams give a 3D spatial light intensity pattern. It was found that masks with a 1.0 and 0.56 μm grating period, produce micron- and submicron-scale 3D features with good unifromity and definition over large substrate areas.

Original languageEnglish (US)
Pages (from-to)1667-1669
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number11
DOIs
StatePublished - Mar 17 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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