Facile fabrication of free standing submicron textured films of Parylene-C

Akhlesh Lakhtakia, L. Wei, A. Kumar, J. Kumar

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.

Original languageEnglish (US)
Pages (from-to)1-3
Number of pages3
JournalMaterials Research Innovations
Volume15
Issue number1
DOIs
StatePublished - Feb 1 2011

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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