Failure Mechanisms of Lead Zirconate Titanate Thin Films during Electromechanical Loading

Kathleen Coleman, Julian Walker, Wanlin Zhu, Song Won Ko, Peter Mardilovich, Susan Trolier-Mckinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Understanding the failure mechanisms of piezoelectric thin films is critical for the commercialization of piezoelectric microelectromechanical systems. This paper describes the failure of 0.6\ \mu \mathrm{m} lead zirconate titanate (PZT) thin films on Si wafers with different in-plane stresses under large electric fields. The films failed by a combination of cracking and thermal breakdown events. It was found that the crack initiation and propagation behavior varied with the stress state of the films. The total stress required for crack initiation was estimated to be near 500 MPa. As expected, cracks propagated perpendicular to the maximum tensile stress direction. Thermal breakdown events and cracks were correlated, suggesting coupling between electrical and mechanical failure. It was also found that films that were released from the underlying substrates were less susceptible to failure by cracking. It was proposed that during electric field loading the released film stacks were able to bow and alleviate some of the stress. Released films may also experience enhanced domain wall motion that increases their fracture toughness. The results indicate that both applied stress and clamping conditions play important roles in the electromechancial failure of piezoelectric thin films.

Original languageEnglish (US)
Title of host publicationIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728164304
DOIs
StatePublished - Jul 2020
Event2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 - Virtual, Keystone, United States
Duration: Jul 19 2020Jul 23 2020

Publication series

NameIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings

Conference

Conference2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020
CountryUnited States
CityVirtual, Keystone
Period7/19/207/23/20

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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