Fast flexible plastic substrate ZnO circuits

Dalong Zhao, Devin A. Mourey, Thomas N. Jackson

Research output: Contribution to journalArticle

64 Scopus citations

Abstract

We report thin-film transistors (TFTs) and circuits fabricated on flexible plastic substrates using ZnO thin films deposited by plasma-enhanced atomic layer deposition at 200 °C. Crossover test structures fabricated on flexible substrates have a good yield, and ZnO TFTs have a field-effect mobility of 20 cm2/V.s. The 15-stage ring oscillators are operated at > 2 MHz with a supply voltage of VDD = 18 V, corresponding to a propagation delay of < 20 ns/stage. To the best of our knowledge, these are the fastest oxide-semiconductor circuits on flexible substrates reported to date.

Original languageEnglish (US)
Article number25
Pages (from-to)323-325
Number of pages3
JournalIEEE Electron Device Letters
Volume31
Issue number4
DOIs
StatePublished - Apr 1 2010

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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