We demonstrate a microelectromechanical-system-based setup for fatigue studies on 200-nm-thick freestanding aluminum specimens in situ inside the transmission electron microscope. The specimens did not show any sign of fatigue damage even at 1.2 × 10-6cycles under nominal stresses about 80% of the static ultimate strength. We show direct evidence to propose that the conventional theory of fatigue crack nucleation through slip bands does not work for nanoscale freestanding thin films, which gives rise to the anomalous fatigue insensitivity.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Microelectromechanical Systems|
|State||Published - Feb 2011|
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering