Flexible thin-film PZT ultrasonic transducers

Tianning Liu, Jeong Nyeon Kim, Susan E. Trolier-Mckinstry, Thomas N. Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.

Original languageEnglish (US)
Title of host publication2018 76th Device Research Conference, DRC 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781538630280
DOIs
StatePublished - Aug 20 2018
Event76th Device Research Conference, DRC 2018 - Santa Barbara, United States
Duration: Jun 24 2018Jun 27 2018

Publication series

NameDevice Research Conference - Conference Digest, DRC
Volume2018-June
ISSN (Print)1548-3770

Other

Other76th Device Research Conference, DRC 2018
CountryUnited States
CitySanta Barbara
Period6/24/186/27/18

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Liu, T., Kim, J. N., Trolier-Mckinstry, S. E., & Jackson, T. N. (2018). Flexible thin-film PZT ultrasonic transducers. In 2018 76th Device Research Conference, DRC 2018 [8442177] (Device Research Conference - Conference Digest, DRC; Vol. 2018-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2018.8442177