Flexible thin-film PZT ultrasonic transducers

Tianning Liu, Jeong Nyeon Kim, Susan E. Trolier-McKinstry, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.

Original languageEnglish (US)
Title of host publication2018 76th Device Research Conference, DRC 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2018-June
ISBN (Print)9781538630280
DOIs
StatePublished - Aug 20 2018
Event76th Device Research Conference, DRC 2018 - Santa Barbara, United States
Duration: Jun 24 2018Jun 27 2018

Other

Other76th Device Research Conference, DRC 2018
CountryUnited States
CitySanta Barbara
Period6/24/186/27/18

Fingerprint

Ultrasonic transducers
Thin films
Substrates
Growth temperature
Polyimides

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Liu, T., Kim, J. N., Trolier-McKinstry, S. E., & Jackson, T. N. (2018). Flexible thin-film PZT ultrasonic transducers. In 2018 76th Device Research Conference, DRC 2018 (Vol. 2018-June). [8442177] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2018.8442177
Liu, Tianning ; Kim, Jeong Nyeon ; Trolier-McKinstry, Susan E. ; Jackson, Thomas Nelson. / Flexible thin-film PZT ultrasonic transducers. 2018 76th Device Research Conference, DRC 2018. Vol. 2018-June Institute of Electrical and Electronics Engineers Inc., 2018.
@inproceedings{c91dce9bd0e34ce880eec54040b9ba1e,
title = "Flexible thin-film PZT ultrasonic transducers",
abstract = "We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.",
author = "Tianning Liu and Kim, {Jeong Nyeon} and Trolier-McKinstry, {Susan E.} and Jackson, {Thomas Nelson}",
year = "2018",
month = "8",
day = "20",
doi = "10.1109/DRC.2018.8442177",
language = "English (US)",
isbn = "9781538630280",
volume = "2018-June",
booktitle = "2018 76th Device Research Conference, DRC 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

Liu, T, Kim, JN, Trolier-McKinstry, SE & Jackson, TN 2018, Flexible thin-film PZT ultrasonic transducers. in 2018 76th Device Research Conference, DRC 2018. vol. 2018-June, 8442177, Institute of Electrical and Electronics Engineers Inc., 76th Device Research Conference, DRC 2018, Santa Barbara, United States, 6/24/18. https://doi.org/10.1109/DRC.2018.8442177

Flexible thin-film PZT ultrasonic transducers. / Liu, Tianning; Kim, Jeong Nyeon; Trolier-McKinstry, Susan E.; Jackson, Thomas Nelson.

2018 76th Device Research Conference, DRC 2018. Vol. 2018-June Institute of Electrical and Electronics Engineers Inc., 2018. 8442177.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Flexible thin-film PZT ultrasonic transducers

AU - Liu, Tianning

AU - Kim, Jeong Nyeon

AU - Trolier-McKinstry, Susan E.

AU - Jackson, Thomas Nelson

PY - 2018/8/20

Y1 - 2018/8/20

N2 - We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.

AB - We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.

UR - http://www.scopus.com/inward/record.url?scp=85053217033&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053217033&partnerID=8YFLogxK

U2 - 10.1109/DRC.2018.8442177

DO - 10.1109/DRC.2018.8442177

M3 - Conference contribution

AN - SCOPUS:85053217033

SN - 9781538630280

VL - 2018-June

BT - 2018 76th Device Research Conference, DRC 2018

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Liu T, Kim JN, Trolier-McKinstry SE, Jackson TN. Flexible thin-film PZT ultrasonic transducers. In 2018 76th Device Research Conference, DRC 2018. Vol. 2018-June. Institute of Electrical and Electronics Engineers Inc. 2018. 8442177 https://doi.org/10.1109/DRC.2018.8442177