Flexoelectric materials and structures for M/NEMS

Wenbin Huang, Kyungrim Kim, Shujun Zhang, Fuh Gwo Yuan, Xiaoning Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recent research progress on flexoelectricity suggests that dramatic enhancement of effective piezoelectric properties desirable for advanced M/NEMS, in principle, is attainable through flexoelectric (FE) effect and scale effect. In this paper, the transverse flexoelectric coefficient μ12 of barium strontium titanate (BST) microcantilevers with thicknesses ranging from 1.4 mm down to 30 μm was measured at room temperature. It was found that μ12 remains to be constant (8.5 μC/m) for all fabricated microcantilevers. Effective piezoelectric coefficients of these microcantilevers were also calculated, indicating that significantly increased effective piezoelectric coefficients can be obtained from microcantilevers with thickness of microns and nanometers, which is promising for micro/nano electromechanical systems (M/NEMS).

Original languageEnglish (US)
Title of host publicationASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Pages761-765
Number of pages5
StatePublished - Dec 1 2011
EventASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011 - Denver, CO, United States
Duration: Nov 11 2011Nov 17 2011

Publication series

NameASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Volume11

Other

OtherASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
CountryUnited States
CityDenver, CO
Period11/11/1111/17/11

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Huang, W., Kim, K., Zhang, S., Yuan, F. G., & Jiang, X. (2011). Flexoelectric materials and structures for M/NEMS. In ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011 (pp. 761-765). (ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011; Vol. 11).