Abstract
Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report the dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.
| Original language | English (US) |
|---|---|
| Article number | 045302 |
| Journal | Nanotechnology |
| Volume | 31 |
| Issue number | 4 |
| DOIs | |
| State | Published - 2020 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering
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Focused-helium-ion-beam blow forming of nanostructures : Radiation damage and nanofabrication. / Kim, Chung Soo; Hobbs, Richard G.; Agarwal, Akshay et al.
In: Nanotechnology, Vol. 31, No. 4, 045302, 2020.Research output: Contribution to journal › Article › peer-review
TY - JOUR
T1 - Focused-helium-ion-beam blow forming of nanostructures
T2 - Radiation damage and nanofabrication
AU - Kim, Chung Soo
AU - Hobbs, Richard G.
AU - Agarwal, Akshay
AU - Yang, Yang
AU - Manfrinato, Vitor R.
AU - Short, Michael P.
AU - Li, Ju
AU - Berggren, Karl K.
N1 - Funding Information: Chung-Soo Kim Richard G Hobbs Akshay Agarwal Yang Yang Vitor R Manfrinato Michael P Short Ju Li Karl K Berggren Chung-Soo Kim Richard G Hobbs Akshay Agarwal Yang Yang Vitor R Manfrinato Michael P Short Ju Li Karl K Berggren Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, 02139, United States of America School of Chemistry, Advanced Materials and Bioengineering Research (AMBER) Centre and Centre for Research in Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland Department of Nuclear Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, United States of America Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, United States of America Authors to whom any correspondence should be addressed. Chung-Soo Kim, Richard G Hobbs, Akshay Agarwal, Yang Yang, Vitor R Manfrinato, Michael P Short, Ju Li and Karl K Berggren 2020-01-17 2019-10-25 09:08:58 cgi/release: Article released cgi/mmedia: Updated ToC/abstract link bin/incoming: New from .zip Gordon and Betty Moore Foundation https://doi.org/10.13039/100000936 Basic Energy Sciences https://doi.org/10.13039/100006151 DE-SC001088 National Research Foundation of Korea https://doi.org/10.13039/501100003725 2013R1A6A3A03065200 Nuclear Energy University Programs https://doi.org/10.13039/100006999 DE-NE0008827 Division of Materials Research https://doi.org/10.13039/100000078 DMR-1419807 Royal Society https://doi.org/10.13039/501100000288 Science Foundation Ireland https://doi.org/10.13039/501100001602 yes Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report the dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology. � 2019 IOP Publishing Ltd [1] Hedler A, Klaumünzer S L and Wesch W 2004 Nat. Mater. 3 804 10.1038/nmat1241 Hedler A, Klaumünzer S L and Wesch W Nat. Mater. 3 2004 804 [2] Moon M-W, Lee S H, Sun J-Y, Oh K H, Vaziri A and Hutchinson J W 2007 Proc. Natl Acad. Sci. 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PY - 2020
Y1 - 2020
N2 - Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report the dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.
AB - Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report the dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.
UR - http://www.scopus.com/inward/record.url?scp=85074309475&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85074309475&partnerID=8YFLogxK
U2 - 10.1088/1361-6528/ab4a65
DO - 10.1088/1361-6528/ab4a65
M3 - Article
C2 - 31578000
AN - SCOPUS:85074309475
SN - 0957-4484
VL - 31
JO - Nanotechnology
JF - Nanotechnology
IS - 4
M1 - 045302
ER -