From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices

Ziwei Zhou, Zhiyuan Zhao, Ye Yu, Bin Ai, Helmuth Möhwald, Ryan C. Chiechi, Joel K.W. Yang, Gang Zhang

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field.

Original languageEnglish (US)
Pages (from-to)2956-2963
Number of pages8
JournalAdvanced Materials
Volume28
Issue number15
DOIs
StatePublished - Apr 20 2016

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices'. Together they form a unique fingerprint.

Cite this