From low- k to ultralow- k thin-film deposition by organosilicon glow discharges

Antonella Milella, James L. Delattre, Fabio Palumbo, Francesco Fracassi, Riccardo D'Agostino

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Fingerprint Dive into the research topics of 'From low- k to ultralow- k thin-film deposition by organosilicon glow discharges'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science