FTIR measurements of compositional heterogeneities

Shuhui Kang, Bryan Vogt, Wen Li Wu, Vivek M. Prabhu, David L. VanderHart, Ashwin Rao, Eric K. Lin, Karen Turnquest

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A general approach to characterize compositional heterogeneity in polymer thin films using Fourier transform infrared (FTIR) spectroscopy has been demonstrated Polymer films with varying degrees of heterogeneity were prepared using a model chemically amplified photoresist where a photoacid catalyzed reaction-diffusion process results in the formation of methacrylic acid (MAA)-rich domains. Within these domains, the carboxylic acid groups dimenze through hydrogen bonding. FTIR measurements of the relative fraction of hydrogen-bonded versus free carboxylic groups are used to quantify the degree of compositional heterogeneity. It was shown that the degree of the spatial heterogeneity varies with changes in the deprotection level and initial copolymer composition. The degree of heterogeneity is small at very low and very high deprotection level and maximize when the deprotection level is around 0.25. Increased non-reactive comonomer content decreases the degree of heterogeneity by reducing the hydrogen bonding efficiency.

Original languageEnglish (US)
Title of host publicationAdvances in Resist Materials and Processing Technology XXIV
EditionPART 1
DOIs
StatePublished - Oct 15 2007
EventAdvances in Resist Materials and Processing Technology XXIV - San Jose, CA, United States
Duration: Feb 26 2007Feb 28 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
NumberPART 1
Volume6519
ISSN (Print)0277-786X

Conference

ConferenceAdvances in Resist Materials and Processing Technology XXIV
CountryUnited States
CitySan Jose, CA
Period2/26/072/28/07

Fingerprint

Polymer films
Fourier transform
Fourier transforms
Hydrogen bonds
Infrared
Infrared radiation
Hydrogen
Photoresists
Carboxylic Acids
Carboxylic acids
Fourier transform infrared spectroscopy
Copolymers
Thin films
Polymers
Acids
hydrogen
Spatial Heterogeneity
Chemical analysis
Infrared Spectroscopy
Copolymer

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Kang, S., Vogt, B., Wu, W. L., Prabhu, V. M., VanderHart, D. L., Rao, A., ... Turnquest, K. (2007). FTIR measurements of compositional heterogeneities. In Advances in Resist Materials and Processing Technology XXIV (PART 1 ed.). [651916] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6519, No. PART 1). https://doi.org/10.1117/12.712659
Kang, Shuhui ; Vogt, Bryan ; Wu, Wen Li ; Prabhu, Vivek M. ; VanderHart, David L. ; Rao, Ashwin ; Lin, Eric K. ; Turnquest, Karen. / FTIR measurements of compositional heterogeneities. Advances in Resist Materials and Processing Technology XXIV. PART 1. ed. 2007. (Proceedings of SPIE - The International Society for Optical Engineering; PART 1).
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Kang, S, Vogt, B, Wu, WL, Prabhu, VM, VanderHart, DL, Rao, A, Lin, EK & Turnquest, K 2007, FTIR measurements of compositional heterogeneities. in Advances in Resist Materials and Processing Technology XXIV. PART 1 edn, 651916, Proceedings of SPIE - The International Society for Optical Engineering, no. PART 1, vol. 6519, Advances in Resist Materials and Processing Technology XXIV, San Jose, CA, United States, 2/26/07. https://doi.org/10.1117/12.712659

FTIR measurements of compositional heterogeneities. / Kang, Shuhui; Vogt, Bryan; Wu, Wen Li; Prabhu, Vivek M.; VanderHart, David L.; Rao, Ashwin; Lin, Eric K.; Turnquest, Karen.

Advances in Resist Materials and Processing Technology XXIV. PART 1. ed. 2007. 651916 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6519, No. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kang S, Vogt B, Wu WL, Prabhu VM, VanderHart DL, Rao A et al. FTIR measurements of compositional heterogeneities. In Advances in Resist Materials and Processing Technology XXIV. PART 1 ed. 2007. 651916. (Proceedings of SPIE - The International Society for Optical Engineering; PART 1). https://doi.org/10.1117/12.712659