Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS

O. Auciello, S. Srinivasan, J. Hiller, A. V. Sumant, Bernd C. Kabius

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to several projected MEMS/NEMS devices, particularly those that require materials with high Young's modulus for MEMS resonators or low surface adhesion forces for MEMS/NEMS working in conditions with extensive surface contact. Diamond films with superior mechanical/ tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications
DOIs
Publication statusPublished - Sep 7 2009
EventMicro- and Nanotechnology Sensors, Systems, and Applications - Orlando, FL, United States
Duration: Apr 15 2009Apr 17 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7318
ISSN (Print)0277-786X

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications
CountryUnited States
CityOrlando, FL
Period4/15/094/17/09

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Auciello, O., Srinivasan, S., Hiller, J., Sumant, A. V., & Kabius, B. C. (2009). Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS. In Micro- and Nanotechnology Sensors, Systems, and Applications [73181B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7318). https://doi.org/10.1117/12.822798