Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS

O. Auciello, S. Srinivasan, J. Hiller, A. V. Sumant, Bernd C. Kabius

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

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Engineering & Materials Science

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Physics & Astronomy

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