@inproceedings{add1af770204464da2d7a29ce53b5f92,
title = "Ga+ Focused Ion Beam Damage in n-type Ga2O3and Its Recovery after Annealing Treatment",
abstract = "Focused Ga+ ion milling of lightly Si-doped, n-type Ga2O3 was performed with 2-30 kV ions at normal incidence and beam currents that were a function of beam voltage. The electrical effects of the ion damage were characterized by Schottky barrier height and diode ideality factor on vertical rectifier structures comprising 10 μm epitaxial n- Ga2O3 on n+ Ga2O3 substrates, while the structural damage was imaged by Transmission Electron Microscopy. The forward current-voltage characteristics showed significant deterioration at 5kV. The I-V characteristics no longer showed rectification for the 30kV condition. Subsequent annealing up to 400°C produced substantial recovery of the I-V characteristics for all beam energies and was sufficient to restore the initial ideality factor completely for beam energies up to 5kV. A remarkable reduction of dislocations can be observed in 30 kV ion exposed sample after annealing at 400°C.",
author = "Xinyi Xia and Nahid Al-Mamun and Warywoba Daudi and Fan Ren and Aman Haque and Pearton, {Stephen J.}",
note = "Funding Information: This work was funded by the Defense Threat Reduction Agency (DTRA) as part of the Interaction of Ionizing Radiation with Matter University Research Alliance (IIRM-URA) under contract number HDTRA1-20-2-0002. The work at UF was also supported by the NSF DMR 1856662 (James Edgar). The work at PSU is also supported by the NSF ECCS 2015795. The content of the information does not necessarily reflect the position or the policy of the federal government, and no official endorsement should be inferred. Publisher Copyright: {\textcopyright} 2022 ECS - The Electrochemical Society.; 242nd ECS Meeting ; Conference date: 09-10-2022 Through 13-10-2022",
year = "2022",
doi = "10.1149/10905.0003ecst",
language = "English (US)",
series = "ECS Transactions",
publisher = "Institute of Physics",
number = "5",
pages = "3--14",
booktitle = "ECS Transactions",
address = "United Kingdom",
edition = "5",
}