GaN Heteroepitaxy on Strain-Engineered (111) Si/Si 1−x Ge x

Anushka Bansal, Nathan C. Martin, Ke Wang, Joan Marie Redwing

Research output: Contribution to journalArticle

Abstract

The metalorganic chemical vapor deposition growth of GaN on strained Si/Si 1−x Ge x epilayers on (111) Si substrates was investigated. A multi-beam optical stress sensor (MOSS) was used for in situ stress measurements during growth of the entire heterostructure. MOSS was initially used to measure the extent of stress relaxation during the growth of constant-composition Si 1−x Ge x layers on Si. The results compared favorably to that obtained by post-growth high-resolution x-ray diffraction. MOSS was also used to monitor stress during the growth of thin, tensile-strained Si on relaxed Si 0.95 Ge 0.05 /compositionally graded epilayers. The tensile-strained Si/Si 1−x Ge x epilayers were then used as virtual substrates for the growth of GaN epilayers using a thin (90 nm) AlN buffer layer. GaN grown on tensile-strained Si exhibited a higher initial compressive stress and reduced final tensile stress compared to films grown directly on (111) Si, resulting in a lower crack density in the GaN along with a reduced density of threading dislocations. These results suggest that strain engineering of the Si surface prior to growth may provide an alternative method to improve the quality of GaN grown on (111) Si.

Original languageEnglish (US)
JournalJournal of Electronic Materials
DOIs
StatePublished - Jan 1 2019

Fingerprint

Epitaxial growth
Epilayers
sensors
Sensors
stress measurement
Stress measurement
stress relaxation
Metallorganic chemical vapor deposition
Stress relaxation
Substrates
Buffer layers
tensile stress
Compressive stress
Tensile stress
metalorganic chemical vapor deposition
Heterojunctions
x ray diffraction
cracks
buffers
Diffraction

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

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title = "GaN Heteroepitaxy on Strain-Engineered (111) Si/Si 1−x Ge x",
abstract = "The metalorganic chemical vapor deposition growth of GaN on strained Si/Si 1−x Ge x epilayers on (111) Si substrates was investigated. A multi-beam optical stress sensor (MOSS) was used for in situ stress measurements during growth of the entire heterostructure. MOSS was initially used to measure the extent of stress relaxation during the growth of constant-composition Si 1−x Ge x layers on Si. The results compared favorably to that obtained by post-growth high-resolution x-ray diffraction. MOSS was also used to monitor stress during the growth of thin, tensile-strained Si on relaxed Si 0.95 Ge 0.05 /compositionally graded epilayers. The tensile-strained Si/Si 1−x Ge x epilayers were then used as virtual substrates for the growth of GaN epilayers using a thin (90 nm) AlN buffer layer. GaN grown on tensile-strained Si exhibited a higher initial compressive stress and reduced final tensile stress compared to films grown directly on (111) Si, resulting in a lower crack density in the GaN along with a reduced density of threading dislocations. These results suggest that strain engineering of the Si surface prior to growth may provide an alternative method to improve the quality of GaN grown on (111) Si.",
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GaN Heteroepitaxy on Strain-Engineered (111) Si/Si 1−x Ge x . / Bansal, Anushka; Martin, Nathan C.; Wang, Ke; Redwing, Joan Marie.

In: Journal of Electronic Materials, 01.01.2019.

Research output: Contribution to journalArticle

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