Graphical methods for robust design of a semiconductor burn-in process

Scott L. Rosen, Chad A. Geist, Daniel Antion Finke, Jyotirmaya Nanda, Russell Richard Barton

Research output: Contribution to journalArticlepeer-review


Discrete-event simulation is a common tool for the analysis of semiconductor manufacturing systems. With the aid of a simulation model, and in conjunction with sensitivity analysis and metamodeling techniques, robust design can be performed to optimize a system. Robust design problems often include integer decision variables. This paper shows a graphical approach to robust design that is effective in the presence of discrete or qualitative variables. The graphical robust design methodology was applied to a backend semiconductor manufacturing process. Changes in specific resource capacities and product mix were examined to determine their effect on the level and variance of cycle time and work in process.

Original languageEnglish (US)
Pages (from-to)1231-1237
Number of pages7
JournalWinter Simulation Conference Proceedings
StatePublished - 2001

All Science Journal Classification (ASJC) codes

  • Chemical Health and Safety
  • Software
  • Safety, Risk, Reliability and Quality
  • Applied Mathematics
  • Modeling and Simulation


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