Graphite formation in diamond film deposition

W. Zhu, C. A. Randall, A. R. Badzian, R. Messier

Research output: Contribution to journalArticle

134 Scopus citations

Abstract

In this paper we report on the existence, distribution, crystallographic orientation, size, and morphology of graphite crystallites within diamond films prepared by microwave plasma assisted chemical vapor deposition. Transmission electron microscopy and Raman spectroscopy techniques were used to characterize graphite formation in diamond films deposited under various conditions.

Original languageEnglish (US)
Pages (from-to)2315-2324
Number of pages10
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume7
Issue number3
DOIs
StatePublished - May 1989

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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