Growth of (103) fiber-textured SrBi2Nb2O9 films on Pt-coated silicon

G. Asayama, J. Lettieri, M. A. Zurbuchen, Y. Jia, S. Trolier-Mckinstry, D. G. Schlom, S. K. Streiffer, J. P. Maria, S. D. Bu, C. B. Eom

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Abstract

(103) fiber-textured SrBi2Nb2O9 thin films have been grown on Pt-coated Si substrates using a SrRuO3 buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) SrRuO3 grains on (111) Pt grains and in turn (103) SrBi2Nb2O 9 grains on (111) SrRuO3 grains. The films exhibit remanent polarization values of 9 μC/cm2. The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures.

Original languageEnglish (US)
Pages (from-to)2371-2373
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number13
DOIs
StatePublished - Apr 1 2002

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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