Abstract
The hot-filament chemical vapor deposition process was used to deposit diamond films on gold and alumina substrates using different deposition conditions. Diamond nucleation and growth on a gold surface readily occurred at low temperatures compared with the alumina substrate. This resulted in selective growth of diamond on the gold surface and patterning of diamond films. Scanning electron microscopy was employed to study the morphology of the films.
Original language | English (US) |
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Pages (from-to) | 41-48 |
Number of pages | 8 |
Journal | Materials Science and Engineering B |
Volume | 26 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1 1994 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering