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Dive into the research topics of 'Growth of nitrogen-doped SiC boules by halide chemical vapor deposition'. Together they form a unique fingerprint.
Chemical Compounds
Chemical vapor deposition
Nitrogen
Crystals
Doping (additives)
Atoms
Carbon
Growth temperature
Secondary ion mass spectrometry
Boron
Capacitance measurement
Sublimation
Epitaxial growth
Voltage measurement
Single crystals
Mercury
Thermodynamic stability
Seed
X ray diffraction
Gases
Flow rate
Substrates
Engineering & Materials Science
Chemical vapor deposition
Nitrogen
Crystals
Doping (additives)
Atoms
Growth temperature
Carbon
Sublimation
Epitaxial growth
Voltage measurement
Single crystals
Boron
Seed
X ray diffraction
Flow rate
Substrates
Gases
Physics & Astronomy
boules
halides
vapor deposition
nitrogen
seeds
crystals
carbon
reactor design
sublimation
secondary ion mass spectrometry
atoms
epitaxy
electrical measurement
polarity
thermal stability
boron
flow velocity
capacitance
single crystals
high resolution
probes