Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates

C. Weber, F. Kahlmann, J. Schubert, W. Zander, Bernd C. Kabius, U. Breuer, Ch Buchal

Research output: Contribution to journalArticle

Abstract

We have studied films of YBa 2 Cu 3 O 7-δ (YBCO) grown on SrTiO 3 substrates, which were implanted with high doses of Co (1 X 10 16 -5 X 10 17 ions/cm 2 at 100 keV). The indirect modification of YBCO by local ion implantation of Co into the substrate is investigated to evaluate the feasibility of a new planar technology for the fabrication of Josephson junctions. The modified YBCO might become a barrier region of a Josephson junction. We found a strong diffusion of the implanted Co ions out of the substrates into the YBCO films during the deposition process, forming YBa 2 Cu 3-x Co x O 7-δ . Our EDX and SNMS analyses show that the Co concentration x is homogeneous across the films. YBa 2 Cu 3-x Co x O 7-δ is well known to be an excellent barrier material for SNS-type Josephson junctions. Using a 1.4 μm thick photoresist mask, we have locally implanted Co into the substrates to study the lateral diffusion of Co into the YBCO film above the non-implanted region. We performed EDX analysis on cross-sectional TEM samples and found strong lateral diffusion of Co from the implanted substrate within the YBCO film located above the non-implanted region.

Original languageEnglish (US)
Pages (from-to)208-216
Number of pages9
JournalPhysica C: Superconductivity and its applications
Volume288
Issue number3-4
DOIs
StatePublished - Sep 1 1997

Fingerprint

Josephson junctions
Substrates
Energy dispersive spectroscopy
Ions
Photoresists
photoresists
Ion implantation
ion implantation
Masks
ions
masks
barium copper yttrium oxide
Transmission electron microscopy
Fabrication
dosage
transmission electron microscopy
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

Cite this

Weber, C., Kahlmann, F., Schubert, J., Zander, W., Kabius, B. C., Breuer, U., & Buchal, C. (1997). Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates Physica C: Superconductivity and its applications, 288(3-4), 208-216. https://doi.org/10.1016/S0921-4534(97)01471-8
Weber, C. ; Kahlmann, F. ; Schubert, J. ; Zander, W. ; Kabius, Bernd C. ; Breuer, U. ; Buchal, Ch. / Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates In: Physica C: Superconductivity and its applications. 1997 ; Vol. 288, No. 3-4. pp. 208-216.
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Weber, C, Kahlmann, F, Schubert, J, Zander, W, Kabius, BC, Breuer, U & Buchal, C 1997, ' Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates ', Physica C: Superconductivity and its applications, vol. 288, no. 3-4, pp. 208-216. https://doi.org/10.1016/S0921-4534(97)01471-8

Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates . / Weber, C.; Kahlmann, F.; Schubert, J.; Zander, W.; Kabius, Bernd C.; Breuer, U.; Buchal, Ch.

In: Physica C: Superconductivity and its applications, Vol. 288, No. 3-4, 01.09.1997, p. 208-216.

Research output: Contribution to journalArticle

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T1 - Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates

AU - Weber, C.

AU - Kahlmann, F.

AU - Schubert, J.

AU - Zander, W.

AU - Kabius, Bernd C.

AU - Breuer, U.

AU - Buchal, Ch

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Weber C, Kahlmann F, Schubert J, Zander W, Kabius BC, Breuer U et al. Growth of YBa 2 Cu 3 O 7-δ on co implanted substrates Physica C: Superconductivity and its applications. 1997 Sep 1;288(3-4):208-216. https://doi.org/10.1016/S0921-4534(97)01471-8