Hierarchical self-assembly of epitaxial semiconductor nanostructures

Jennifer Lynn Gray, Surajit Atha, Robert Hull, Jerrold A. Floro

Research output: Contribution to journalArticlepeer-review

43 Scopus citations


We describe a new route to hierarchical assembly of semiconductor nanostructures, employing guided organization of self-assembling epitaxial quantum dot molecules in the Ge xSi 1-x/Si(100) system. The quantum dot molecule comprises a shallow strain relieving pit, defined by {105} facets, and bounded by 4-fold {105}-faceted islands. Through topographic "forcing functions" fabricated on the substrate surface, the quantum dot molecules may be organized into arrays, enabling hierarchical structures spanning length scales from tens of nanometers to macroscopic dimensions.

Original languageEnglish (US)
Pages (from-to)2447-2450
Number of pages4
JournalNano letters
Issue number12
StatePublished - Dec 1 2004

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering


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