High frequency MoS2 nanomechanical resonators

Jaesung Lee, Zenghui Wang, Keliang He, Jie Shan, Philip X.L. Feng

Research output: Contribution to journalArticlepeer-review

234 Scopus citations


Molybdenum disulfide (MoS2), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on the demonstration of movable and vibrating MoS2 nanodevices, where MoS2 diaphragms as thin as 6 nm (a stack of 9 monolayers) exhibit fundamental-mode nanomechanical resonances up to f 0 ∼ 60 MHz in the very high frequency (VHF) band, and frequency-quality (Q) factor products up to f0 × Q ∼ 2 × 1010Hz, all at room temperature. The experimental results from many devices with a wide range of thicknesses and lateral sizes, in combination with theoretical analysis, quantitatively elucidate the elastic transition regimes in these ultrathin MoS2 nanomechanical resonators. We further delineate a roadmap for scaling MoS2 2D resonators and transducers toward microwave frequencies. This study also opens up possibilities for new classes of vibratory devices to exploit strain- and dynamics-engineered ultrathin semiconducting 2D crystals.

Original languageEnglish (US)
Pages (from-to)6086-6091
Number of pages6
JournalACS nano
Issue number7
StatePublished - Jul 23 2013

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)


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