High frequency piezoelectric MEMS devices

I. G. Mina, H. Kim, I. Kim, S. Park, K. Choi, T. N. Jackson, R. L. Tutwiler, S. Trolier-McKinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High frequency ultrasound array transducers are being explored for high resolution imaging systems. This increase in resolution is made possible by enabling a simultaneous increase in operating frequency (50 MHz to about 1GHz) and close-coupling of the electrical circuitry. Several different processing methods are being explored to fabricate array transducers. In one implementation, the piezoelectric transducer is prepared by mist deposition of PbZr0.52Ti0.48O3 (PZT) films over Ni posts. In addition, a xylophone bar transducer has also been prototyped, again using thin film PZT as the active piezoelectric layer. Because the drive voltages of these transducers are low, close coupling of the electrical circuitry is possible. A CMOS transceiver for a 9 element-array has been fabricated in 0.35 μm process technology. The first generation CMOS transceiver chip contains beamforming electronics, receiver circuitry, and analog to digital converters with 27 Kbyte on-chip buffer memory.

Original languageEnglish (US)
Title of host publication2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages700-701
Number of pages2
DOIs
StatePublished - 2007
Event2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan
Duration: May 27 2007May 31 2007

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics

Other

Other2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
CountryJapan
CityNara-city
Period5/27/075/31/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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  • Cite this

    Mina, I. G., Kim, H., Kim, I., Park, S., Choi, K., Jackson, T. N., Tutwiler, R. L., & Trolier-McKinstry, S. (2007). High frequency piezoelectric MEMS devices. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 700-701). [4393375] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393375