High performances of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidede fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer is developed. The PMAT exhibits a very high stroke level with high load capability, broad frequency range (>100kHz), and high displacement sensitivity. In addition, the simulated results, based on the properties of the materials and the structure of the device, are consisting with the experimental observation.
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics