High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer

T. B. Xu, Z. Y. Cheng, Qiming Zhang

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    66 Scopus citations

    Abstract

    We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1J/cm3) of the active polymer [the electrostrictive P(VDF-TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

    Original languageEnglish (US)
    Pages (from-to)1082-1084
    Number of pages3
    JournalApplied Physics Letters
    Volume80
    Issue number6
    DOIs
    StatePublished - Feb 11 2002

    All Science Journal Classification (ASJC) codes

    • Physics and Astronomy (miscellaneous)

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