High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer

T. B. Xu; Z. Y. Cheng; Qiming Zhang

doi:10.1063/1.1448661

High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer

T. B. Xu, Z. Y. Cheng, Qiming Zhang

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Abstract

We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1J/cm³) of the active polymer [the electrostrictive P(VDF-TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

Original language	English (US)
Pages (from-to)	1082-1084
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	6
DOIs	https://doi.org/10.1063/1.1448661
State	Published - Feb 11 2002

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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abstract = "We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1J/cm3) of the active polymer [the electrostrictive P(VDF-TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.",

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AU - Cheng, Z. Y.

AU - Zhang, Qiming

PY - 2002/2/11

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AB - We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1J/cm3) of the active polymer [the electrostrictive P(VDF-TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

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High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer

Abstract

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