High performance RF FETs using high-k dielectrics on wafer-scale quasi-free-standing epitaxial graphene

Joshua Alexander Robinson, Matthew J. Hollander, Michael La Bella, Kathleen Trumbull, Mike Zhu, Randall Cavalero, David W. Snyder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We explore the effect of processing on graphene/metal ohmic contact resistance, the integration of high-κ dielectric seeds and overlayers on carrier transport in epitaxial graphene, and directly demonstrate the importance of buffer elimination at the graphene/silicon carbide (0001) interface for high frequency applications. We present a robust method for forming high quality ohmic contacts to graphene, which improves the contact resistance by nearly six thousand times compared to untreated metal/graphene interfaces. Optimal specific contact resistance for treated Ti/Au contacts is found to average < 100 Ohm-μm. Additionally, we introduce a novel seeding technique for depositing dielectrics by atomic layer deposition that utilizes direct deposition of high-κ seed layers and can lead to an increase in Hall mobility up to 70% from as-grown. Finally, we demonstrate that buffer elimination at the graphene/silicon carbide (0001) interface results in excellent high frequency performance of graphene transistors with current gain cutoff frequency > 130 GHz at 75 nm gate lengths.

Original languageEnglish (US)
Title of host publicationSilicon Carbide and Related Materials 2011, ICSCRM 2011
Pages669-674
Number of pages6
DOIs
StatePublished - May 28 2012
Event14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States
Duration: Sep 11 2011Sep 16 2011

Publication series

NameMaterials Science Forum
Volume717-720
ISSN (Print)0255-5476

Other

Other14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
CountryUnited States
CityCleveland, OH
Period9/11/119/16/11

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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