A hybrid physical-chemical vapor deposition process using a pocket heater was developed for the growth of high quality epitaxial large-area MgB 2 thin films and c-axis textured MgB2 thick films. This technique is able to independently control the substrate and Mg source temperatures and maintain sufficient Mg overpressure to ensure phase stability. The two-inch large-area MgB2 thin films showed uniform superconducting properties with the superconducting transition temperature Tc of about 40 K, residual resistivity ratio (RRR) of about 10, and critical current density Jc of about 107 A cm-2 (0 T, 5 K). The thick films (∼10 νm) on sapphire substrates showed a maximum Tc of 40 K and RRR of 15, and a Jc of 1.6 × 106 A cm-2 at low applied magnetic fields even at 20 K. High quality thick films also have been obtained on metal substrates.
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Condensed Matter Physics
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry