High speed anisotropic etching of Pyrex® for microsystems applications

Abhijat Goyal, Vincent Hood, Srinivas Tadigadapa

Research output: Contribution to journalArticlepeer-review

40 Scopus citations

Abstract

We report high speed etching of glass (Pyrex® 7740) substrates using an inductively coupled plasma (ICP) reactive ion etching (RIE) process employing sulfur hexafluoride/argon (SF6/Ar) based chemistry. Electroplated Ni over a patterned Cr/Au seed layer was used as the hard mask for etching. Detailed process characterization was performed by varying the process parameters which include substrate temperature, ICP power, substrate power, operating pressure, distance of substrate holder from ICP source and composition and flow rates of the etching gases. An rms surface roughness of 1.97 nm at a high etch rate of 0.536 μm/min was achieved by process optimization. We used least square fit to find the direction of maximum variance in the process parametric space and to reduce the dimensionality of the process parametric space. The etch rate was then linearly related to a new variable termed as the etch rate number.

Original languageEnglish (US)
Pages (from-to)657-663
Number of pages7
JournalJournal of Non-Crystalline Solids
Volume352
Issue number6-7 SPEC. ISS.
DOIs
StatePublished - May 15 2006

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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