High temperature broadband BAW contact transducer

David A. Parks, Bernhard R. Tittmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Aluminum nitride, AlN, point group 6mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AlN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AlN can be used at temperatures substantially beyond this range.

Original languageEnglish (US)
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages2389-2392
Number of pages4
DOIs
StatePublished - Dec 1 2007
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
CountryUnited States
CityNew York, NY
Period10/28/0710/31/07

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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