Highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via oxidative molecular layer deposition

Sarah E. Atanasov, Mark D. Losego, Bo Gong, Edward Sachet, Jon Paul Maria, Philip S. Williams, Gregory N. Parsons

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

This work introduces oxidative molecular layer deposition (oMLD) as a chemical route to synthesize highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via sequential vapor exposures of molybdenum(V) chloride (MoCl5, oxidant) and ethylene dioxythiophene (EDOT, monomer) precursors. The growth temperature strongly affects PEDOT's crystalline structure and electronic conductivity. Films deposited at ∼150°C exhibit a highly textured crystalline structure, with {010} planes aligned parallel with the substrate. Electrical conductivity of these textured films is routinely above 1000 S cm-1, with the most conductive films exceeding 3000 S cm-1. At lower temperatures (∼100°C) the films exhibit a random polycrystalline structure and display smaller conductivities. Compared with typical electrochemical, solution-based, and chemical vapor deposition techniques, oMLD PEDOT films achieve high conductivity without the need for additives or postdeposition treatments. Moreover, the sequential-reaction synthesis method produces highly conformal coatings over high aspect ratio structures, making it attractive for many device applications.

Original languageEnglish (US)
Pages (from-to)3471-3478
Number of pages8
JournalChemistry of Materials
Volume26
Issue number11
DOIs
StatePublished - Jun 10 2014

Fingerprint

Thin films
Crystalline materials
Conductive films
Molybdenum
Growth temperature
Oxidants
Chlorides
Aspect ratio
Chemical vapor deposition
Ethylene
Monomers
Vapors
Coatings
poly(3,4-ethylene dioxythiophene)
Substrates
Temperature
molybdenum chloride
Electric Conductivity
ethylene

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

Cite this

Atanasov, Sarah E. ; Losego, Mark D. ; Gong, Bo ; Sachet, Edward ; Maria, Jon Paul ; Williams, Philip S. ; Parsons, Gregory N. / Highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via oxidative molecular layer deposition. In: Chemistry of Materials. 2014 ; Vol. 26, No. 11. pp. 3471-3478.
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Highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via oxidative molecular layer deposition. / Atanasov, Sarah E.; Losego, Mark D.; Gong, Bo; Sachet, Edward; Maria, Jon Paul; Williams, Philip S.; Parsons, Gregory N.

In: Chemistry of Materials, Vol. 26, No. 11, 10.06.2014, p. 3471-3478.

Research output: Contribution to journalArticle

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