Highly textured laser annealed Pb(Zr0.52Ti0.48)O 3 thin films

S. S.N. Bharadwaja, F. Griggio, J. Kulik, S. Trolier-Mckinstry

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Abstract

RF sputtered amorphous Pb(Zr0.52Ti0.48)O3 (PZT) films (∼300-350 nm in thickness) on {111}Pt/Ti/SiO2/Si or {001}PbTiO3/Pt/Ti/SiO2/Si substrates were laser crystallized to obtain highly textured {111} and {001} PZT thin films. The measured remanent polarizations and coercive fields were 31 μC/cm2 and 86 kV/cm for {001} films and 24 μC/cm2 and 64 kV/cm for {111} oriented PZT films, respectively. The maximum e31,f piezoelectric charge coefficients are ∼ -11 C/m2 for {001} and ∼ -9 C/m2 for {111} PZT thin films respectively.

Original languageEnglish (US)
Article number042903
JournalApplied Physics Letters
Volume99
Issue number4
DOIs
StatePublished - Jul 25 2011

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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