Highly tunable electrothermally actuated arch resonator

Amal Z. Hajjaj, Abdallah Ramini, Nouha Alcheikh, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper demonstrates experimentally, theoretically, and numerically a wide-range tunability of electrothermally actuated MEMS arch beams. The beams are made of silicon and are intentionally fabricated with some curvature as inplane shallow arches. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared to the experimental data and results of a multiphysics finite-element model. A good agreement is found among all the results. The electrothermal voltage is applied between the anchors of the clamped-clamped MEMS arch beam, generating a current that passes through the MEMS arch beam and controls its axial stress caused by thermal expansion. When the electrothermal voltage increases, the compressive stress increases inside the arch beam. This leads to increase in its curvature, thereby increases the resonance frequencies of the structure. We show here that the first resonance frequency can increase up to twice its initial value. We show also that after some electro-thermal voltage load, the third resonance frequency starts to become more sensitive to the axial thermal stress, while the first resonance frequency becomes less sensitive. These results can be used as guidelines to utilize arches as wide-range tunable resonators.

Original languageEnglish (US)
Title of host publication12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791850183
DOIs
StatePublished - 2016
EventASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 - Charlotte, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume6

Other

OtherASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016
CountryUnited States
CityCharlotte
Period8/21/168/24/16

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modeling and Simulation

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  • Cite this

    Hajjaj, A. Z., Ramini, A., Alcheikh, N., & Younis, M. I. (2016). Highly tunable electrothermally actuated arch resonator. In 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control (Proceedings of the ASME Design Engineering Technical Conference; Vol. 6). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC201659898