FingerprintDive into the research topics of 'Hydrogen Permeation, Si Defect Generation, and Their Interaction During CHF3/02 Contact Etching'. Together they form a unique fingerprint.
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O. O. Awadelkarim, P. I. Mikulan, T. Gu, S. J. Fonash, R. A. Ditizio
Research output: Contribution to journal › Article › peer-review