Hydrogen sensors: Role of palladium thin film morphology

J. RaviPrakash, A. H. McDaniel, M. Horn, L. Pilione, P. Sunal, R. Messier, R. T. McGrath, F. K. Schweighardt

Research output: Contribution to journalArticlepeer-review

63 Scopus citations


The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H2 in H2/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H2 in presence of CO.

Original languageEnglish (US)
Pages (from-to)439-446
Number of pages8
JournalSensors and Actuators, B: Chemical
Issue number2
StatePublished - Jan 10 2007

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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