Hydrogenated amorphous silicon germanium black-matrix material for active-matrix liquid-crystal displays

Hagen Klauk, Steven L. Wright, Lauren F. Palmateer, Suzanne E. Mohney, Thomas N. Jackson

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

Integration of the black matrix (BM) in active-matrix liquid-crystal displays (AMLCDs) into the TFT array is desirable to improve display performance. This requires a black-matrix material that is both an optical absorber and an electrical insulator. Amorphous silicon germanium (a-SiGe:H) is a candidate material for this application. When deposited by magnetron sputtering, a-SiGe:H can have both high optical density and high electrical resistivity. Compared to organic materials considered for black-matrix integration, a-SiGe:H offers higher optical density at a given film thickness, more-flexible processing, and better process compatibility with AMLCD fabrication.

Original languageEnglish (US)
Pages (from-to)393-397
Number of pages5
JournalJournal of the Society for Information Display
Volume5
Issue number4
DOIs
StatePublished - Jan 1 1997

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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