Identification of macroscopic process observables for thin-film growth

Amit Varshney, Antonios Armaou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical "coarse" dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.

Original languageEnglish (US)
Title of host publicationProceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2140-2146
Number of pages7
ISBN (Print)1424401712, 9781424401710
DOIs
StatePublished - 2006
Event45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States
Duration: Dec 13 2006Dec 15 2006

Publication series

NameProceedings of the IEEE Conference on Decision and Control
ISSN (Print)0191-2216

Other

Other45th IEEE Conference on Decision and Control 2006, CDC
CountryUnited States
CitySan Diego, CA
Period12/13/0612/15/06

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Modeling and Simulation
  • Control and Optimization

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