Identification of macroscopic process observables for thin-film growth

Amit Varshney, Antonios Armaou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical "coarse" dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.

Original languageEnglish (US)
Title of host publicationProceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
Pages2140-2146
Number of pages7
StatePublished - Dec 1 2006
Event45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States
Duration: Dec 13 2006Dec 15 2006

Other

Other45th IEEE Conference on Decision and Control 2006, CDC
CountryUnited States
CitySan Diego, CA
Period12/13/0612/15/06

Fingerprint

Film growth
Thin Films
Thin films
Surface diffusion
Surface Diffusion
State-space Model
Adsorption
Controllers
Dynamic Behavior
Simulation
Synthesis
Controller
Invariant
Optimization
Alternatives
Demonstrate

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Modeling and Simulation
  • Control and Optimization

Cite this

Varshney, A., & Armaou, A. (2006). Identification of macroscopic process observables for thin-film growth. In Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC (pp. 2140-2146). [4177740]
Varshney, Amit ; Armaou, Antonios. / Identification of macroscopic process observables for thin-film growth. Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC. 2006. pp. 2140-2146
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Varshney, A & Armaou, A 2006, Identification of macroscopic process observables for thin-film growth. in Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC., 4177740, pp. 2140-2146, 45th IEEE Conference on Decision and Control 2006, CDC, San Diego, CA, United States, 12/13/06.

Identification of macroscopic process observables for thin-film growth. / Varshney, Amit; Armaou, Antonios.

Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC. 2006. p. 2140-2146 4177740.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Varshney A, Armaou A. Identification of macroscopic process observables for thin-film growth. In Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC. 2006. p. 2140-2146. 4177740