TY - JOUR
T1 - Imaging mass spectrometry on the nanoscale with cluster ion beams
AU - Winograd, Nicholas
N1 - Publisher Copyright:
© 2014 American Chemical Society.
PY - 2015/1/6
Y1 - 2015/1/6
N2 - Imaging with cluster secondary ion mass spectrometry (SIMS) is reaching a mature level of development. Using a variety of molecular ion projectiles to stimulate desorption, 3-dimensional imaging with the selectivity of mass spectrometry can now be achieved with submicrometer spatial resolution and <10 nm depth resolution. In this Perspective, stock is taken regarding what it will require to routinely achieve these remarkable properties. Issues include the chemical nature of the projectile, topography formation, differential erosion rates, and perhaps most importantly, ionization efficiency. Shortcomings of existing instrumentation are also noted. Speculation about how to successfully resolve these issues is a key part of the discussion.
AB - Imaging with cluster secondary ion mass spectrometry (SIMS) is reaching a mature level of development. Using a variety of molecular ion projectiles to stimulate desorption, 3-dimensional imaging with the selectivity of mass spectrometry can now be achieved with submicrometer spatial resolution and <10 nm depth resolution. In this Perspective, stock is taken regarding what it will require to routinely achieve these remarkable properties. Issues include the chemical nature of the projectile, topography formation, differential erosion rates, and perhaps most importantly, ionization efficiency. Shortcomings of existing instrumentation are also noted. Speculation about how to successfully resolve these issues is a key part of the discussion.
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U2 - 10.1021/ac503650p
DO - 10.1021/ac503650p
M3 - Review article
C2 - 25458665
AN - SCOPUS:84920383499
VL - 87
SP - 328
EP - 333
JO - Analytical Chemistry
JF - Analytical Chemistry
SN - 0003-2700
IS - 1
ER -