Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials

R. Levi-Setti, J. M. Chabala, J. Li, K. L. Gavrilov, R. Mogilevsky, K. K. Soni, C. G. Pantano, R. Gijbels

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

This article describes the application of scanning ion microprobe (SIM) microanalysis for the characterization of advanced engineered materials. In conjunction with secondary ion mass spectrometry (SIMS), scanning ion microprobes can image elemental distributions over surfaces with high lateral resolution (50-100 nm). With this technique, most elements, including isotopes, can be detected with good sensitivity. The principles and instrumentation associated with the SIM/SIMS technique are briefly described and ongoing developments are outlined. The analytical capabilities of the technique are illustrated by case studies of aluminum-lithium alloys, zinc oxide varistors, aluminum matrix composites, and photographic materials.

Original languageEnglish (US)
Pages (from-to)1161-1172
Number of pages12
JournalScanning Microscopy
Volume7
Issue number4
StatePublished - Dec 1 1993

Fingerprint

Secondary ion mass spectrometry
secondary ion mass spectrometry
mass spectroscopy
Spectroscopy
Scanning
Imaging techniques
scanning
Ions
aluminum-lithium alloys
Lithium alloys
varistors
Varistors
ions
Microanalysis
Zinc oxide
microanalysis
Chemical elements
zinc oxides
Isotopes
Aluminum alloys

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Levi-Setti, R., Chabala, J. M., Li, J., Gavrilov, K. L., Mogilevsky, R., Soni, K. K., ... Gijbels, R. (1993). Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials. Scanning Microscopy, 7(4), 1161-1172.
Levi-Setti, R. ; Chabala, J. M. ; Li, J. ; Gavrilov, K. L. ; Mogilevsky, R. ; Soni, K. K. ; Pantano, C. G. ; Gijbels, R. / Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials. In: Scanning Microscopy. 1993 ; Vol. 7, No. 4. pp. 1161-1172.
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Levi-Setti, R, Chabala, JM, Li, J, Gavrilov, KL, Mogilevsky, R, Soni, KK, Pantano, CG & Gijbels, R 1993, 'Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials', Scanning Microscopy, vol. 7, no. 4, pp. 1161-1172.

Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials. / Levi-Setti, R.; Chabala, J. M.; Li, J.; Gavrilov, K. L.; Mogilevsky, R.; Soni, K. K.; Pantano, C. G.; Gijbels, R.

In: Scanning Microscopy, Vol. 7, No. 4, 01.12.1993, p. 1161-1172.

Research output: Contribution to journalArticle

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T1 - Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials

AU - Levi-Setti, R.

AU - Chabala, J. M.

AU - Li, J.

AU - Gavrilov, K. L.

AU - Mogilevsky, R.

AU - Soni, K. K.

AU - Pantano, C. G.

AU - Gijbels, R.

PY - 1993/12/1

Y1 - 1993/12/1

N2 - This article describes the application of scanning ion microprobe (SIM) microanalysis for the characterization of advanced engineered materials. In conjunction with secondary ion mass spectrometry (SIMS), scanning ion microprobes can image elemental distributions over surfaces with high lateral resolution (50-100 nm). With this technique, most elements, including isotopes, can be detected with good sensitivity. The principles and instrumentation associated with the SIM/SIMS technique are briefly described and ongoing developments are outlined. The analytical capabilities of the technique are illustrated by case studies of aluminum-lithium alloys, zinc oxide varistors, aluminum matrix composites, and photographic materials.

AB - This article describes the application of scanning ion microprobe (SIM) microanalysis for the characterization of advanced engineered materials. In conjunction with secondary ion mass spectrometry (SIMS), scanning ion microprobes can image elemental distributions over surfaces with high lateral resolution (50-100 nm). With this technique, most elements, including isotopes, can be detected with good sensitivity. The principles and instrumentation associated with the SIM/SIMS technique are briefly described and ongoing developments are outlined. The analytical capabilities of the technique are illustrated by case studies of aluminum-lithium alloys, zinc oxide varistors, aluminum matrix composites, and photographic materials.

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Levi-Setti R, Chabala JM, Li J, Gavrilov KL, Mogilevsky R, Soni KK et al. Imaging-SIMS (secondary ion mass spectroscopy) studies of advanced materials. Scanning Microscopy. 1993 Dec 1;7(4):1161-1172.