Impact of CF4 plasma treatment on GaN

Rongming Chu, Chang Soo Shu, Man Hoi Wong, Nicolas Fichtenbaum, David Brown, Lee McCarthy, Stacia Keller, Wu Feng, James S. Speck, Umesh K. Mishra

Research output: Contribution to journalArticlepeer-review

46 Scopus citations


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Engineering & Materials Science

Chemical Compounds