Impact of Post-Lithography Polymer Residue on the Electrical Characteristics of MoS 2 and WSe 2 Field Effect Transistors

Jierui Liang, Ke Xu, Blaec Toncini, Brian Bersch, Bhakti Jariwala, Yu Chuan Lin, Joshua Alexander Robinson, Susan K. Fullerton-Shirey

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The residue of common photo- and electron-beam resists, such as poly(methyl methacrylate) (PMMA), is often present on the surface of 2D crystals after device fabrication. The residue degrades device properties by decreasing carrier mobility and creating unwanted doping. Here, MoS 2 and WSe 2 field effect transistors (FETs) with residue are cleaned by contact mode atomic force microscopy (AFM) and the impact of the residue on: 1) the intrinsic electrical properties, and 2) the effectiveness of electric double layer (EDL) gating are measured. After cleaning, AFM measurements confirm that the surface roughness decreases to its intrinsic state (i.e., ≈0.23 nm for exfoliated MoS 2 and WSe 2 ) and Raman spectroscopy shows that the characteristic peak intensities (E 2g and A 1g ) increase. PMMA residue causes p-type doping corresponding to a charge density of ≈7 × 10 11 cm −2 on back-gated MoS 2 and WSe 2 FETs. For FETs gated with polyethylene oxide (PEO) 76 :CsClO 4 , removing the residue increases the charge density by 4.5 × 10 12 cm −2 , and the maximum drain current by 247% (statistically significant, p < 0.05). Removing the residue likely allows the ions to be positioned closer to the channel surface, which is essential for achieving the best possible electrostatic gate control in ion-gated devices.

Original languageEnglish (US)
Article number1801321
JournalAdvanced Materials Interfaces
Volume6
Issue number3
DOIs
StatePublished - Feb 8 2019

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Field effect transistors
Lithography
Charge density
Polymethyl methacrylates
Atomic force microscopy
Polymers
Doping (additives)
Drain current
Carrier mobility
Ions
Polyethylene oxides
Raman spectroscopy
Electrostatics
Electron beams
Cleaning
Electric properties
Surface roughness
Fabrication
Crystals

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Liang, Jierui ; Xu, Ke ; Toncini, Blaec ; Bersch, Brian ; Jariwala, Bhakti ; Lin, Yu Chuan ; Robinson, Joshua Alexander ; Fullerton-Shirey, Susan K. / Impact of Post-Lithography Polymer Residue on the Electrical Characteristics of MoS 2 and WSe 2 Field Effect Transistors In: Advanced Materials Interfaces. 2019 ; Vol. 6, No. 3.
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Impact of Post-Lithography Polymer Residue on the Electrical Characteristics of MoS 2 and WSe 2 Field Effect Transistors . / Liang, Jierui; Xu, Ke; Toncini, Blaec; Bersch, Brian; Jariwala, Bhakti; Lin, Yu Chuan; Robinson, Joshua Alexander; Fullerton-Shirey, Susan K.

In: Advanced Materials Interfaces, Vol. 6, No. 3, 1801321, 08.02.2019.

Research output: Contribution to journalArticle

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T1 - Impact of Post-Lithography Polymer Residue on the Electrical Characteristics of MoS 2 and WSe 2 Field Effect Transistors

AU - Liang, Jierui

AU - Xu, Ke

AU - Toncini, Blaec

AU - Bersch, Brian

AU - Jariwala, Bhakti

AU - Lin, Yu Chuan

AU - Robinson, Joshua Alexander

AU - Fullerton-Shirey, Susan K.

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